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Wissenschaftlicher Artikel
Crystallographic Texture of Submicron Thin Aluminum Nitride Films on Molybdenum Electrode for Suspended Micro and Nanosystems
Erschienen in
ECS Journal of Solid State Science and Technology
,
2
(2013)
, 4
, P180-P184
.
https://doi.org/10.1149/2.001305jss
ISSN:
2162-8769
The Electrochemical Society
Bibliographische Angaben
Sprache:
englisch
Erscheinungsjahr: 2013
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